Active solid-state devices (e.g., transistors, solid-state diode
Thin active physical layer which is
Inventor
active
Amine-free deposition of metal-nitride films
Boundaries with elevated deuterium levels
Catalytic nucleation monolayer for metal seed layers
Catalytic nucleation monolayer for metal seed layers
Copper precursors for CVD/ALD/digital CVD of copper metal films
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