Plasma etch process using polymerizing etch gases with...

Details Plasma etch process using polymerizing etch gases with... Plasma etch process using polymerizing etch gases with...

2006-04-28

2008-10-07

Ahmed, Shamim (Department: 1792)

Etching a substrate: processes

Gas phase etching of substrate

Application of energy to the gaseous etchant or to the...

C216S058000, C216S059000, C438S706000, C438S710000, C156S345340

Reexamination Certificate

active

07431859

ABSTRACT:
A plasma etch process includes injecting process gases with different compositions of chemical species through different radial gas injection zones of an overhead electrode to establish a desired distribution of chemical species among the plural gas injection zones.

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