4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. Having glow discharge electrode gas energizing means

Kenny L. Doan

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Apparatus for uniformly etching a dielectric layer

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Apparatus for uniformly etching a dielectric layer

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Ashable layers for reducing critical dimensions of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of etching a trench in a silicon-containing...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of preventing etch profile bending and bowing in high...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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