4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Law Office of Robert M. Wallace

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Apparatus for metal plasma vapor deposition and re-sputter...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Apparatus for metal plasma vapor deposition and re-sputter...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Apparatus for plasma-enhanced physical vapor deposition of...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Apparatus for wafer level arc detection at an electrostatic...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location
Reexamination Certificate

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Apparatus for wafer level arc detection at an RF bias...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location
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