4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Steve Sansoni

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Coating for reducing contamination of substrates during...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Detachable electrostatic chuck for supporting a substrate in...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method and apparatus for sputter etch conditioning a ceramic bod

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method and apparatus for sputter etch conditioning a ceramic...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1338138

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