4. Chemistry: electrical current producing apparatus, product, and
  5. Current producing cell, elements, subcombinations and...
  6. Flat-type unit cell and specific unit cell components

Janah & Associates P.C.

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Apparatus and method for monitoring processing of a substrate

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Cleaning and refurbishing chamber components having metal...

Stock material or miscellaneous articles – Composite – Of metal
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Cleaning of a substrate support

Stock material or miscellaneous articles – Composite – Of metal
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Cleaning of chamber components

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Cleaning of native oxide with hydrogen-containing radicals

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With plasma generation means remote from processing chamber
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