4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Allen Lau

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Detachable electrostatic chuck for supporting a substrate in...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Lower pedestal shield

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
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Method for detecting the position of a shutter disk in a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Pedestal with integral shield

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Pedestal with integral shield

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2326469

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