Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2011-04-12
2011-04-12
Crawford, Gene (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C414S936000
Reexamination Certificate
active
07925377
ABSTRACT:
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment of the cluster tool, grouping substrates together, and transferring and processing the substrates in groups of two or more, improves system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.
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Armer Helen R.
Backer John A.
Carlson Charles
Herchen Harald
Hudgens Jeffrey
Applied Materials Inc.
Crawford Gene
Patterson & Sheridan LLP
Prakasam Ramya
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