4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Article handling

John A. Backer

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Cluster tool architecture for processing a substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Cluster tool architecture for processing a substrate

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2284918

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