4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Charles Carlson

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Cartesian cluster tool configuration for lithography type...

Coating apparatus – Work holders – or handling devices
Reexamination Certificate

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Cluster tool architecture for processing a substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Cluster tool architecture for processing a substrate

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Reexamination Certificate

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Method of retaining a substrate during a substrate...

Material or article handling – Process
Reexamination Certificate

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Method of retaining a substrate during a substrate...

Material or article handling – Process
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1823309

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