4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Article handling

Jeffrey Hudgens

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Cluster tool architecture for processing a substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
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Cluster tool architecture for processing a substrate

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
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Method of retaining a substrate during a substrate...

Material or article handling – Process
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Method of retaining a substrate during a substrate...

Material or article handling – Process
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Substrate gripper for a substrate handling robot

Material or article handling – Horizontally swinging load support – Swinging about pivot
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Profile ID: LFUS-PAI-P-2284917

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