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ALD process for capacitor dielectric

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Alignment mark and alignment method for the fabrication of...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Alignment mark and alignment method for the fabrication of...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Aluminum-filled self-aligned trench for stacked capacitor struct

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Aluminum-filled self-aligned trench for stacked capacitor...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Aluminum-filled self-aligned trench for stacked capacitor...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Atomic layer deposition of capacitor dielectric

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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