4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Trench capacitor
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Trench capacitor and method for manufacturing the same

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Trench capacitor and process for preventing parasitic leakage

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Trench capacitor with insulation collar and corresponding...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Trench capacitor with void-free conductor fill

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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