4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Total dielectric isolation
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Chemical conversion film of tantalum or niobium, method for...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Cleaving process to fabricate multilayered substrates using...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Conductive through via structure and process for electronic...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Control of buried oxide in SIMOX

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Control of buried oxide quality in low dose SIMOX

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Controlling internal thermal oxidation and eliminating deep...

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Creation of a polarizable layer in the buried oxide of...

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Creation of high mobility channels in thin-body SOI devices

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Creation of high mobility channels in thin-body SOI devices

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