Method and apparatus for using phase shifter cutbacks to...
Method and apparatus that compensates for phase shift mask...
Method and apparatus to accurately correlate defect coordinates
Method and apparatus to accurately correlate defect coordinates
Method and enhancing clear field phase shift masks with...
Method and layout for high density reticle
Method and process for design of integrated circuits using...
Method and resulting structure for mosaic of...
Method and structure for fabricating dark-periphery mask for...
Method and structure for fabricating patterns on phase shift...
Method and system for contiguous proximity correction for...
Method and system for contiguous proximity correction for...
Method and system for design of a reticle to be manufactured...
Method and system for determining flow rates for contact...
Method and system for determining optimum optical proximity...
Method and system for improving transmission of light...
Method and system for mask pattern correction
Method and system for optimizing intra-field critical...
Method and system for providing optical proximity correction...
Method and system for providing optical proximity correction...