Reflective electron patterning device and method of using same
Reflective optical systems for EUV lithography
Reflector for generating a neutral beam and substrate...
Removable liners for charged particle beam systems
Removable liners for charged particle beam systems
Removable liners for charged particle beam systems
Removing byproducts of physical and chemical reactions in an...
Resolution in microscopy and microlithography
Respiration phantom for quality assurance
Reticle and direct lithography writing strategy
Reticle-focus detector, and charged-particle-beam...
Reticle-focus detector, and charged-particle-beam...
Reticles for charged-particle-beam microlithography that...
RF loaded line type capacitive plasma source for broad range...
Ribbon beam ion implanter cluster tool
Ribbon electron beam for inspection system
Rotary apparatus for moving workpieces through treatment beam wi
Rotatable workpiece support including cyclindrical workpiece...
Rotating beam ion implanter
Rotating field electron beam apparatus and method