Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1974-12-13
1977-03-22
Smith, Alfred E.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250442, 250451, H01J 3700
Patent
active
040132625
ABSTRACT:
An apparatus for distributing a beam substantially uniformly over a workpiece comprising a workpiece holder, first means for rotating the holder in a generally circular path about a first axis which is generally perpendicular to the axis of the beam, second means for counter-rotating the holder about a second axis parallel to the first axis at a rate dependent upon the rate of rotation of the holder about the first axis to provide, in cooperation with the first means, a constant orientation of the holder relative to the beam, and third means for producing relative motion between the workpiece and the beam in a direction parallel to the first axis.
REFERENCES:
patent: 3240934 (1966-03-01), Watanabe et al.
patent: 3446960 (1969-05-01), Sciacca et al.
patent: 3628013 (1971-12-01), Heide
patent: 3643091 (1972-02-01), Lucas
patent: 3689766 (1972-09-01), Freeman
patent: 3702397 (1972-11-01), Lucas
patent: 3778621 (1973-12-01), Mikajiri
patent: 3778626 (1973-12-01), Robertson
"Ion Beams", Wilson & Brewer Wiley-Interscience Publications, 1973, pp. 457-458.
Ryding Geoffrey
Schott, Jr. Charles M.
Anderson B. C.
Smith Alfred E.
Varian Associates
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