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  5. Irradiation of objects or material
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Charged-particle-beam exposure device and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged-particle-beam exposure device and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam image-transfer apparatus exhibiting...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Charged-particle-beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam mapping projection-optical systems and...

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Charged-particle-beam mapping projection-optical systems and...

Radiant energy – Irradiation of objects or material
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Charged-particle-beam mask-based exposure apparatus...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam microlithography apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged-particle-beam microlithography apparatus and methods...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam microlithography apparatus and methods...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam microlithography apparatus and methods...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam microlithography apparatus and methods...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam microlithography apparatus and methods...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam microlithography apparatus and methods...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam microlithography apparatus, reticles,...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam optical components and systems...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam optical system exhibiting aberration corre

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged-particle-beam optical systems

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged-particle-beam optical systems

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam optical systems and microlithography...

Radiant energy – Irradiation of objects or material
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