4. Radiant energy
  5. Irradiation of objects or material
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Ribbon beam ion implanter cluster tool

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ribbon electron beam for inspection system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Rotary apparatus for moving workpieces through treatment beam wi

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Rotatable workpiece support including cyclindrical workpiece...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Rotating beam ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Rutherford backscattering detection for use in Ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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