Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1976-07-01
1979-01-02
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250292, G01N 2300, H01J 3726
Patent
active
041328922
ABSTRACT:
A raster scanning ion microscope for determining, with a large field of view, the lateral distribution of elements, isotopes and compounds at the surface and in the bulk of solid specimens and for displaying the surface topography of the sample. The scanning ion microscope consists of an ion gun to produce a primary ion beam, a means to focus and raster scan the primary ion beam over the surface of the specimen, a means to form a beam of secondary ions out of all particles sputtered from the specimen, an energy analyzer and a mass spectrometer for secondary ion analysis and a means for optimum transport of the secondary ions from the specimen to the mass spectrometer. Use of a quadrupole mass filter as a mass analyzer reduces restrictions usually faced with magnetic type mass analyzer and allows imaging of the specimen with a large field of view. Moreover non-normal secondary ion extraction and/or non-normal primary ion incidence in combination with low secondary ion extraction voltages result in the capability of the instrument of displaying the surface topography of the specimen.
REFERENCES:
patent: 3686499 (1972-08-01), Omura et al.
patent: 3859226 (1975-01-01), Schillalies
patent: 3894233 (1975-07-01), Tamura
patent: 3986025 (1976-10-01), Fujiwara et al.
Anderson Bruce C.
Gesellschaft fur Strahlen- und Umweltforschung mbH Munchen
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