Rutherford backscattering surface analyzer with 180-degree defle

Details Rutherford backscattering surface analyzer with 180-degree defle Rutherford backscattering surface analyzer with 180-degree defle

1990-02-02

1990-10-30

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

328230, 328233, H01J 37252, H05H 506

Patent

active

049670786

ABSTRACT:
A Rutherford backscattering analyzer comprising in combination:

REFERENCES:
patent: 3209269 (1965-09-01), Julian et al.
patent: 3683287 (1972-08-01), Miessner
Fogel et al., Soviet Physics-Technical Physics (5), 1960, pp. 58-65.

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