Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-07-18
2006-07-18
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S069000, C355S053000, C716S030000
Reexamination Certificate
active
07079223
ABSTRACT:
A method and system is provided for computing lithographic images that may take into account non-scalar effects such as lens birefringence, resist stack effects, tailored source polarizations, and blur effects of the mask and the resist. A generalized bilinear kernel is formed, which is independent of the mask transmission function, and which may then be treated using a decomposition to allow rapid computation of an image that includes such non-scalar effects. Weighted pre-images may be formed from a coherent sum of pre-computed convolutions of the dominant eigenfunctions of the generalized bilinear kernel with the appropriate mask polygon sectors. The image at a point may be formed from the incoherent sum of the weighted pre-images over all of the dominant eigenfunctions of the generalized bilinear kernel. The resulting image can then be used to perform model-based optical proximity correction (MBOPC).
REFERENCES:
patent: 6563566 (2003-05-01), Rosenbluth et al.
patent: 6738859 (2004-05-01), Liebchen
“Method Of Measuring The Spatial Resolution Of A Photoresist”—J.A. Hoffnagle, et al. 2002 Optical Society of America—p. 1776.
“Reduction Of ASIC Gate-Level Line-End Shortening By Mask Compensation”—J. Garofalo, et al. SPIE vol. 2440—Optical/Laser Microlithography VIII—p. 171.
“Improved Modeling Performance With An Adapted Vectorial Formulation Of The Hopkins Imaging Equation”—Adam, et al.—p. 78-91.
Simulation Of Imaging And Stray Light Effects In Immersion Lithography—Hafeman, et al. SPIE vol. 5040—Optical Microlithography XVI, ed. Anthony Yen (2003), p. 700.
Gallatin Gregg M.
Gordon Ronald L.
Hinsberg William D.
Hoffnagle John A.
Houle Frances A.
Blecker Ira D.
International Business Machines - Corporation
Rutledge D.
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