Filter for projection photolithographic system

Details Filter for projection photolithographic system Filter for projection photolithographic system

1993-09-10

1995-03-07

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 77, G03B 2772, G03B 2742, G03B 2732

Patent

active

053963113

ABSTRACT:
A filter for use in a projection photolithographic system comprising:

REFERENCES:
patent: 4631416 (1986-12-01), Trutna, Jr.
patent: 4931830 (1990-06-01), Suwa et al.
patent: 5025165 (1991-06-01), Chen et al.
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5208629 (1993-05-01), Matsuo et al.
patent: 5253040 (1993-10-01), Kamon et al.
patent: 5264898 (1993-11-01), Kamon et al.
patent: 5274420 (1993-12-01), Chastang et al.
patent: 5311249 (1994-05-01), Kamon et al.
Tounai et al, "Resolution Improvement with Annular Illumination", SPIE vol. 1674 Optical/Laser Microlithography V (1992), pp. 753-766.
Kamon et al, "Photolithography System Using Annular Illumination", JJAP Series 5, Proc. of 1991 Intern. MicroProcess Conference, pp. 33-41.
Shiraishi et al, "New Imaging Technique for 64M-DRAM", SPIE vol. 1674 Optical/Laser Microlithography V (1992), pp. 741-753.
Noguchi et al, "Subhalf Micron Lithography System With Phase-Shifting Effect", SPIE vol. 1674 Optical/Laser Microlithography V (1992), pp. 92-105.

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