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Scattered-light laser microscope

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Scattered/transmitted light information system

Optics: measuring and testing – Of light reflection – With diffusion
Patent

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Scattering attenuator

Optics: measuring and testing – For optical fiber or waveguide inspection
Reexamination Certificate

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Scattering cells

Optics: measuring and testing – Sample – specimen – or standard holder or support – Fluid containers
Patent

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Scattering monitor in optical fiber drawing systems

Optics: measuring and testing – For optical fiber or waveguide inspection
Reexamination Certificate

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Scatterometer

Optics: measuring and testing – Of light reflection – With diffusion
Reexamination Certificate

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Scatterometer and a method for inspecting a surface

Optics: measuring and testing – Of light reflection – With diffusion
Reexamination Certificate

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Scatterometer and a method for observing a surface

Optics: measuring and testing – Of light reflection – With diffusion
Reexamination Certificate

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Scatterometer including an internal calibration system

Optics: measuring and testing – Of light reflection
Reexamination Certificate

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Scatterometer, a lithographic apparatus and a focus analysis...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Scatterometry alignment for imprint lithography

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Scatterometry based measurements of a moving substrate

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Scatterometry based measurements of a rotating substrate

Optics: measuring and testing – Of light reflection
Reexamination Certificate

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Scatterometry by phase sensitive reflectometer

Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate

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Scatterometry by phase sensitive reflectometer

Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate

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Scatterometry for junction metrology

Optics: measuring and testing – Of light reflection – With diffusion
Reexamination Certificate

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Scatterometry for samples with non-uniform edges

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Scatterometry metrology using inelastic scattering

Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate

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Scatterometry metrology using inelastic scattering

Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate

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Scatterometry of grating structures to monitor wafer stress

Optics: measuring and testing – Material strain analysis
Reexamination Certificate

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