Scatterometer and a method for observing a surface

Details Scatterometer and a method for observing a surface Scatterometer and a method for observing a surface

2004-02-18

2008-03-25

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Of light reflection

With diffusion

C356S600000

Reexamination Certificate

active

07349096

ABSTRACT:
A scatterometer comprising light source means (11) for providing an incident light beam (8) at different angles in the direction of a sample (5) to be analyzed, and a concave screen (1,2) for receiving the reflection (19) of the incident light beam (8). The screen (1,2) has substantially the shape of a portion of a sphere, for example a hemisphere, whereby the location of the sample (5) is in its center. The screen (1,2) having an aperture (9) through which the incident light beam (8) passes towards said sample (5). Said light source means (11) and at least a portion of the screen (2) including said aperture (9) can rotate relative to the sample (5), around an axis (3) through said center and substantial perpendicular to said direction of the incident radiation beam.

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