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Apparatus and measurement procedure for the fast,...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Detection system for nanometer scale topographic...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Device for acquiring a three-dimensional video constituted...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Lithographic apparatus and device manufacturing method with...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Lithographic apparatus and device manufacturing method with...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Method and apparatus for optically measuring periodic...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Method and system for measuring the shape of a reflective...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Method of determining reflective surface of reflector in...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Shape evaluation method, shape evaluation device, and device...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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Surface state inspecting method and substrate inspecting...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
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