4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition
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Appearance inspection apparatus and the method of inspecting...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Appearance inspection method and apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Arrangement and method for inspecting unpatterned wafers

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Arrangement for the visual inspection of substrates

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Automated inspection system for metallic surfaces

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Automated process control using optical metrology with a...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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