4. Optics: measuring and testing
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Easy to align interferometric reference reflectors

Optics: measuring and testing – By polarized light examination – With birefringent element
Patent

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Ellipsometer, measurement device and method, and...

Optics: measuring and testing – By polarized light examination – With birefringent element
Reexamination Certificate

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Ellipsometer, measurement device and method, and...

Optics: measuring and testing – By polarized light examination – With birefringent element
Reexamination Certificate

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Exposure apparatus and method responsive to light beam wavelengt

Optics: measuring and testing – By polarized light examination – With birefringent element
Patent

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Exposure apparatus implementing priority speed setting arrangeme

Optics: measuring and testing – By polarized light examination – With birefringent element
Patent

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Extended-source low coherence interferometer for flatness testin

Optics: measuring and testing – By polarized light examination – With birefringent element
Patent

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