Optics: measuring and testing – By polarized light examination – With birefringent element
Reexamination Certificate
2008-01-08
2008-01-08
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By polarized light examination
With birefringent element
C359S494010, C359S256000
Reexamination Certificate
active
07317528
ABSTRACT:
An ellipsometer includes an optical component and a detector. The optical component has two birefringent parts in optical communication via a border surface. Light incident on the border surface is split into two reflected and two transmitted components. The detector is configured to measure a property of at least three out of the four components. Based on the measured properties, a state of polarization of the incident light may be determined.
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“Polarization Patent”, http://www.instant-analysis.com/patents/polarization—patent.htm dated May 2, 2004.
Translation of Japanese Office Action in JP Appl. No. 2005-235530 Issued Jul. 13, 2007.
ASML Netherlands B.V.
Lauchman Layla G.
Pillsbury Winthrop Shaw & Pittman LLP
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