Ellipsometer, measurement device and method, and...

Details Ellipsometer, measurement device and method, and... Ellipsometer, measurement device and method, and...

2008-01-08

2008-01-08

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By polarized light examination

With birefringent element

C359S494010, C359S256000

Reexamination Certificate

active

11183782

ABSTRACT:
An ellipsometer includes an optical component and a detector. The optical component has two birefringent parts in optical communication via a border surface. Light incident on the border surface is split into two reflected and two transmitted components. The detector is configured to measure a property of at least three out of the four components. Based on the measured properties, a state of polarization of the incident light may be determined.

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“Polarization Patent”, http://www.instant-analysis.com/patents/polarization—patent.htm dated May 2, 2004.
Translation of Japanese Office Action in JP Appl. No. 2005-235530 Issued Jul. 13, 2007.

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