Extended-source low coherence interferometer for flatness testin

Details Extended-source low coherence interferometer for flatness testin Extended-source low coherence interferometer for flatness testin

1996-12-06

1998-04-07

Epps, Georgia Y.

Optics: measuring and testing

By polarized light examination

With birefringent element

356345, G01B 902

Patent

active

057370818

ABSTRACT:
An interferometer particularly suitable for testing the flatness of transparent plano-parallel test pieces employs an extended spatially non-coherent light source. The source is directed to a first beam splitter at an angle of incidence other than normal; and the beam is split into first and second spatially non-coherent divergent wavefronts. A reference surface reflects the first wavefront and a surface under test reflects the second wavefront. A second beam splitter receives and recombines the first and second reflected spatially non-coherent wavefronts; and an interference detector is located to receive the combined reflected wavefronts to produce the interferogram. The distance traveled by the wavefronts from the first beam splitter to the detector is equal, and the optical characteristics of the light path traveled by both wavefronts is the same.

REFERENCES:
patent: 5495334 (1996-02-01), Nagoshi et al.
patent: 5504578 (1996-04-01), Kopf
patent: 5528369 (1996-06-01), Starkey
patent: 5546185 (1996-08-01), Okumura et al.

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