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Inspection of surfaces

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interference detecting apparatus and tomography apparatus

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometer having a dynamic beam steering assembly

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometer system

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometer system and litographic step-and-scan...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometer system for displacement and straightness...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometer with dynamic beam steering element

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometers with coated polarizing beam splitters that...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric apparatus and method for surface profile...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric apparatus for ultra-high precision...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric cyclic error compensation

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric instrument provided with an arrangement for...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric instrument provided with an arrangement for...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric instrument provided with an arrangement for...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric measurement of positions, position changes,...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric measuring device for determining the profile...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric measuring method and device for measuring...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric servo control system for stage metrology

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometric servo control system for stage metrology

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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Interferometry system having a dynamic beam steering...

Optics: measuring and testing – By light interference – Having light beams of different frequencies
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