Inspection of surfaces

Details Inspection of surfaces Inspection of surfaces

2005-06-14

2005-06-14

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

Reexamination Certificate

active

06906803

ABSTRACT:
A device for the inspection of surfaces, notably for the inspection of a surface of a semiconductor (14), which device comprises at least one laser light source (1) and a detector for detecting the light (13) that is reflected from the surface (10) to be inspected; the device also includes at least one mode filter (15; 15.1) for filtering the reflected light.

REFERENCES:
patent: 5200795 (1993-04-01), Kim et al.
patent: 6084671 (2000-07-01), Holcomb
patent: 6088092 (2000-07-01), Chen et al.
patent: 6122058 (2000-09-01), Van Der Werf et al.
patent: 6151127 (2000-11-01), Kempe
patent: 4209701 (1993-09-01), None
patent: WO9734124 (1997-09-01), None
Mueller, Guido et al. “Determination and optimization of mode matching into optical cavities by heterodyne detection”. Optics Letters, Feb. 15, 2000, vol. 25, No. 4, pp. 266-268.

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