Optics: measuring and testing – By light interference – Having light beams of different frequencies
Reexamination Certificate
2007-10-02
2007-10-02
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
Having light beams of different frequencies
C356S511000
Reexamination Certificate
active
11123978
ABSTRACT:
An apparatus for detecting the surface profile of a test object includes a light source, a beam splitter, a reflective component, a sensor, and a computing device. The light source emits a light beam. The beam splitter divides the light beam into reference and probing beams. The reference beam is reflected by the reflective component back to the beam splitter. The reflective component is configured so that components of the reflected reference beam travel at different optical path lengths to the beam splitter. The probing beam is reflected by the test object back to the beam splitter. The beam splitter combines the reflected reference and probing beams to result in a heterodyne light beam. The sensor converts the heterodyne light beam into a corresponding electrical signal. The computing device records the converted electrical signal. A method for detecting the surface profile of the test object is also disclosed.
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Chroma Ate Inc.
Connolly Patrick
Townsend and Townsend / and Crew LLP
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