Interferometric measuring method and device for measuring...

Details Interferometric measuring method and device for measuring... Interferometric measuring method and device for measuring...

2006-05-16

2006-05-16

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C356S512000

Reexamination Certificate

active

07046369

ABSTRACT:
An interferometric measuring method and device for measuring the shape of, or the distance to, surfaces are provided, in which light is generated, modulated with respect to its frequency, conducted to both an object surface and a reference surface, brought to interference, and conducted to a photodetector, and, to detect the particular distance, a phase of the photodetector signal is evaluated. A simple, rugged configuration, with the capability of taking a high-resolution measurements in the context of a large unambiguity range, is achieved in that the phase is considered in at least two different instants with the wavelengths that correspond on the basis of the frequency modulation, and the results are fed to the evaluation.

REFERENCES:
patent: 4594003 (1986-06-01), Sommargren
patent: 4886363 (1989-12-01), Jungquist
patent: 5293215 (1994-03-01), Pfendler et al.
patent: 5777742 (1998-07-01), Marron
patent: 5883715 (1999-03-01), Steinlechner et al.
patent: 198 08 273 (1999-09-01), None

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