MEMS device control with filtered voltage signal shaping

MEMS device control with filtered voltage signal shaping

MEMS device with failure diagnosis function

MEMS driver circuit arrangement

MEMS dynamic optical spectral filter

Mems element having perpendicular portion formed from substrate

MEMS micro mirrors driven by electrodes fabricated on...

MEMS mirror arrays and external lens system in an optical...

MEMS mirrors with precision clamping mechanism

MEMS optical backplane interface

MEMS optical balanced path switch

MEMS optical cross-connect switch

MEMS optical latching switch

MEMS optical switch actuator

MEMS optical switch and method of manufacture

MEMS optical switch on a single chip and method

MEMS optical switch with a notched latching apparatus for...

MEMS optical switch with thermal actuator

MEMS optical switch with torsional hinge and method of...

MEMS optical switches having obliquely angled inputs and...