Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2007-04-10
2007-04-10
Song, Sarah (Department: 2874)
Optical waveguides
With optical coupler
Switch
C385S016000
Reexamination Certificate
active
10290745
ABSTRACT:
An array of electrostatically tiltable mirrors are formed in a MEMS structure. A first SOI wafer is etched to form an array of tiltable plates in the silicon device layer joined to the remainder of the wafer through pairs of torsion beams. A second SOI wafer is etched to form cavities corresponding to the tiltable plates. A ceramic multi-chip module (MCM) carrier is formed with multiple layers of wiring and electrodes corresponding to the tiltable plates. The two SOI wafers including their handle layers are bonded together. The handle layer of the second SOI is removed, and the bonded wafers are diced into chips. Each chip is bonded to a respective MCM carrier. Thereafter, the handle layer of the first SOI wafer is removed to release the tiltable mirror plates and the torsion beams. Electronic control chips may be bonded to the MCM carrier.
REFERENCES:
patent: 6470110 (2002-10-01), Lin
patent: 6922499 (2005-07-01), Boie et al.
patent: 2001/0017726 (2001-08-01), Hara et al.
patent: 2002/0117728 (2002-08-01), Brosnihhan et al.
patent: 2005/0152637 (2005-07-01), Walter et al.
Huang Lucy
Mitchell Jay S.
Rajan Narayanan
Wu Chien Hung
Guenzer Charles S.
Movaz Networks, Inc.
Song Sarah
LandOfFree
MEMS micro mirrors driven by electrodes fabricated on... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with MEMS micro mirrors driven by electrodes fabricated on..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS micro mirrors driven by electrodes fabricated on... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3770833