MEMS device with failure diagnosis function

Details MEMS device with failure diagnosis function MEMS device with failure diagnosis function

2006-03-22

2008-12-09

Wood, Kevin S (Department: 2874)

Optical waveguides

With optical coupler

Switch

C310S365000

Reexamination Certificate

active

07463798

ABSTRACT:
In order to implement an MEMS device which monitors a mechanical response characteristic of a moving part to detect a precursor of a fatal failure without needing correction of an existing control input and without adding any components, there are provided vibration detecting means80for detecting a micro vibration excited in a moving part60in one of binary switching states, a dynamic-characteristic analyzing unit which analyzes a dynamic characteristic of the moving part60on the basis of an output from the detection, a memory100which stores the analyzed data, an operation unit110which retrieves the stored data, compares two temporally successive pieces of data and calculates difference information between the two pieces of data, and a failure diagnosis unit120which performs failure diagnosis based on the difference information.

REFERENCES:
patent: 7302131 (2007-11-01), Ma et al.
patent: 63-085413 (1988-04-01), None
patent: 2002-159098 (2002-05-01), None
patent: 2003-343449 (2003-12-01), None
patent: 2004-048187 (2004-02-01), None
patent: 2005-037885 (2005-02-01), None

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