Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2006-08-21
2008-09-23
Connelly-Cushwa, M. R. (Department: 2874)
Optical waveguides
With optical coupler
Switch
C385S014000, C385S016000, C385S017000
Reexamination Certificate
active
07428353
ABSTRACT:
A MEMS system is disclosed. The system includes a MEMS device having including a gimbal-less device mount supported by two or more bi-axial linkages. Each bi-axial linkage is mechanically coupled between the device mount and an actuator. Each bi-axial linkage is distinct from the actuator. Each bi-axial linkage includes a first flexure beam configured to flex about a first axis and a second flexure beam attached to the first flexure beam. The second flexure beam is configured to flex about a second axis. The two or more bi-axial linkages provide the device mount with two or more degrees of freedom of movement. The bi axial linkages and device mount are formed from the same device layer. The MEMS device has a mechanical response that is approximately proportional to a square of a drive voltage. A signal converter is adapted to convert a signal representing a desired position of the MEMS device to a voltage and a filter is coupled to the signal converter. The filter has a substantially flat group delay response. The filter doesn't retain any frequencies at or near a natural resonant frequency ωnof the MEMS device. An output of the filter or signal converter is coupled to MEMS device to provide the drive voltage.
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Castelino Kenneth
Milanovic Veljko
Adriatic Research Institute
Connelly-Cushwa M. R.
Isenberg Joshua D.
JDI Patent
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