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Exposure apparatus

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Patent

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Exposure apparatus

Optical: systems and elements – Lens – Multiple component lenses
Patent

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Exposure apparatus

Optical: systems and elements – Optical modulator – Light wave directional modulation
Patent

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Exposure apparatus and device manufacturing method using the...

Optical: systems and elements – Light dispersion
Reexamination Certificate

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Exposure apparatus and field stop thereof

Optical: systems and elements – Glare or unwanted light reduction
Reexamination Certificate

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Exposure apparatus and field stop thereof

Optical: systems and elements – Glare or unwanted light reduction
Reexamination Certificate

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Exposure apparatus and method

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Reexamination Certificate

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Exposure apparatus and method

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Reexamination Certificate

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Exposure apparatus and method

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Reexamination Certificate

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Exposure apparatus and method

Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate

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Exposure apparatus for reproducing a mask pattern onto a photo-s

Optical: systems and elements – Holographic system or element – Copying by holographic means
Patent

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Exposure apparatus for reproducing a mask pattern onto a photo-s

Optical: systems and elements – Holographic system or element – Copying by holographic means
Patent

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Exposure apparatus having a magnifying lens system

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Patent

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Exposure apparatus having catadioptric projection optical system

Optical: systems and elements – Lens – With reflecting element
Patent

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Exposure apparatus having catadioptric projection optical system

Optical: systems and elements – Lens – With field curvature shaping
Patent

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Exposure apparatus having catadioptric projection optical...

Optical: systems and elements – Lens – With reflecting element
Reissue Patent

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Exposure apparatus having catadioptric projection optical...

Optical: systems and elements – Lens – With field curvature shaping
Reissue Patent

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Exposure device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Exposure device

Optical: systems and elements – Lens – With light limiting or controlling means
Reexamination Certificate

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Exposure device for color CRT manufacture and a compound correct

Optical: systems and elements – Prism – With reflecting surface
Patent

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