Exposure apparatus having catadioptric projection optical system

Details Exposure apparatus having catadioptric projection optical system Exposure apparatus having catadioptric projection optical system

1997-12-09

1999-12-07

Epps, Georgia

Optical: systems and elements

Lens

With reflecting element

359727, G02B 1700

Patent

active

059993332

ABSTRACT:
To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plane. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.

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