Optical: systems and elements – Lens – With field curvature shaping
Reissue Patent
2006-03-21
2006-03-21
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Lens
With field curvature shaping
C359S364000, C359S434000, C359S631000, C359S726000, C359S732000, C359S738000, C359S800000, C355S053000, C356S399000, C356S400000, C250S203700, C250S548000
Reissue Patent
active
RE039024
ABSTRACT:
To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plant. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.
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Lester Evelyn A.
Nikon Corporation
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