Exposure apparatus having catadioptric projection optical...

Details Exposure apparatus having catadioptric projection optical... Exposure apparatus having catadioptric projection optical...

2006-03-21

2006-03-21

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S364000, C359S434000, C359S631000, C359S726000, C359S732000, C359S738000, C359S800000, C355S053000, C356S399000, C356S400000, C250S203700, C250S548000

Reissue Patent

active

RE039024

ABSTRACT:
To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plant. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.

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