Micromirror for MEMS device
Micromirror having offset addressing electrode
Micromirror having reduced space between hinge and mirror...
Micromirror having reduced space between hinge and mirror...
Micromirror having reduced space between hinge and mirror...
Micromirror in cross-connect switch for optical...
Micromirror modulation method and digital apparatus with...
Micromirror position sensing units for reconfigurable...
Micromirror structures for orthogonal illumination
Micromirror systems with concealed multi-piece hinge structures
Micromirror systems with electrodes configured for...
Micromirror systems with electrodes configured for...
Micromirror systems with open support structures
Micromirror systems with side-supported mirrors and...
Micromirror truss structure and fabrication method
Micromirror unit and method of making the same
Micromirrors and hinge structures for micromirror arrays in...
Micromirrors and hinge structures for micromirror arrays in...
Micromirrors and off-diagonal hinge structures for...
Micromirrors array with improved light throughput