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Micromirror for MEMS device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror having offset addressing electrode

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror having reduced space between hinge and mirror...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror having reduced space between hinge and mirror...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror having reduced space between hinge and mirror...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror in cross-connect switch for optical...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror modulation method and digital apparatus with...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror position sensing units for reconfigurable...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror structures for orthogonal illumination

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror systems with concealed multi-piece hinge structures

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror systems with electrodes configured for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror systems with electrodes configured for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror systems with open support structures

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror systems with side-supported mirrors and...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror truss structure and fabrication method

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror unit and method of making the same

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirrors and hinge structures for micromirror arrays in...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirrors and hinge structures for micromirror arrays in...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirrors and off-diagonal hinge structures for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirrors array with improved light throughput

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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