Micromirror systems with concealed multi-piece hinge structures

Details Micromirror systems with concealed multi-piece hinge structures Micromirror systems with concealed multi-piece hinge structures

2005-06-14

2005-06-14

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S298000, C359S223100, C359S224200

Reexamination Certificate

active

06906848

ABSTRACT:
Micromirror systems with concealed multi-piece hinge structures are provided for reflective applications. Generally, light is reflected by these structures adapted for three-dimensional tilt as well as up-and-down or out-of-plane actuation. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable solutions for use in optical switching, projection and other applications, especially optical applications.

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