Micromirror for MEMS device

Details Micromirror for MEMS device Micromirror for MEMS device

2006-06-06

2006-06-06

Spector, David N. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C427S166000

Reexamination Certificate

active

07057794

ABSTRACT:
A micromirror which includes a substrate, a reflective layer comprising pure aluminum overlying the substrate and a protective layer comprising titanium nitride overlying the reflective layer is disclosed.

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