Micromirror in cross-connect switch for optical...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S223100, C359S224200

Reexamination Certificate

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06995894

ABSTRACT:
Micromirror in a cross-connect switch for an optical communication system, and method for fabricating the same, the micromirror including a rotatable mirror rotatable in an X-axis direction for reflecting an incident light at a predetermined angle, rotatable beams around the rotatable mirror each connected to the rotatable mirror for rotating in a Y-axis direction together with the rotatable mirror, supporting posts around the rotatable beams each connected to the rotatable beam for supporting the rotatable beams, and a driving part on a bottom of the rotatable mirror for rotating the rotatable mirror and/or the rotatable beams as a voltage is provided thereto.

REFERENCES:
patent: 5178728 (1993-01-01), Boysel et al.
patent: 6201629 (2001-03-01), McClelland et al.
patent: 6295154 (2001-09-01), Laor et al.

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