Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-03-22
2005-03-22
Pham, Long (Department: 2814)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
Reexamination Certificate
active
06870659
ABSTRACT:
Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.
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Becking Frank P.
Exajoule LLC
Farahani Dana
LandOfFree
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