Micromirrors array with improved light throughput

Details Micromirrors array with improved light throughput Micromirrors array with improved light throughput

2005-11-29

2005-11-29

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100

Reexamination Certificate

active

06970283

ABSTRACT:
A micromirror array device comprising at least two of a plurality of zones of separately controllable tiltable reflecting elements, each of the tiltable reflecting elements of a zone being capable of tilting about an axis of predetermined tilt orientation associated with the zone between a first reflecting position reflecting an incident beam to a predetermined first direction (on direction), and a second reflecting position reflecting the incident beam to a predetermined second direction (off direction), each of the zones having a predetermined tilt orientation for all reflecting elements in that zone, that is different from the tilt orientation of at least one other zone of the zones.

REFERENCES:
patent: 5212582 (1993-05-01), Nelson
patent: 5233456 (1993-08-01), Nelson
patent: 5583688 (1996-12-01), Hornbeck
patent: 6268952 (2001-07-01), Godil et al.
patent: 6382799 (2002-05-01), Nishikawa et al.

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