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Aberration compensating optical element, optical system,...

Optical: systems and elements – Diffraction – From zone plate
Reexamination Certificate

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Aberration compensating optical element, optical system,...

Optical: systems and elements – Diffraction – From zone plate
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Achromatic fresnel optics based lithography for short...

Optical: systems and elements – Diffraction – From zone plate
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Achromatic fresnel optics for ultraviolet and x-ray radiation

Optical: systems and elements – Diffraction – From zone plate
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Apparatus and method for measuring aerial image of EUV mask

Optical: systems and elements – Diffraction – From zone plate
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Apparatus utilizing a variably diffractive radiation element

Optical: systems and elements – Diffraction – From zone plate
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Array illuminator using a binary optics phase plate

Optical: systems and elements – Diffraction – From zone plate
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Athermalized and achromatized optical systems employing diffract

Optical: systems and elements – Diffraction – From zone plate
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Athermalized diffractive optical elements

Optical: systems and elements – Diffraction – From zone plate
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