Achromatic fresnel optics for ultraviolet and x-ray radiation

Optical: systems and elements – Diffraction – From zone plate

Reexamination Certificate

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C359S566000, C359S576000, C359S355000, C359S361000

Reexamination Certificate

active

06917472

ABSTRACT:
An achromatic Fresnel optic that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The AFO has a wide range of potential applications in lithography, microimaging with various contrast mechanisms and measurement techniques.

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patent: 5559338 (1996-09-01), Elliott et al.
patent: 5926318 (1999-07-01), Hebert
patent: 5946281 (1999-08-01), Ito et al.
patent: RE36352 (1999-10-01), Swanson et al.
patent: 6285737 (2001-09-01), Sweatt et al.
patent: 6483638 (2002-11-01), Shafer et al.
patent: 2002/0005938 (2002-01-01), Omura
patent: 1 006 400 (2000-06-01), None
patent: 1 006 400 (2003-05-01), None

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